openalexZenodo (CERN European Organization for Nuclear Research)
Feature Importance and Growth Rate Prediction in SiC PVT Processes through Advanced Machine Learning Models
Silicon carbide is a key wide-bandgap semiconductor material for next-generation power electronics, yet the Physical Vapor Transport (PVT) method used for bulk crystal growth remains constrained by complex thermal-chemical interactions and low growth rates. This study develops a…
Also available via: European Organization for Nuclear Research