crossrefMachine Learning: Science and Technology2026-07-21
Multimodal deep learning for automated atomic qubits fabrication in silicon
Yuwei Cui, Kunrong Wu, Ping Wu, Luyan Yang, Mingchao Duan, Guanyong Wang, et al.
Abstract Donor-based spin qubits in silicon are a promising platform for scalable quantum computing due to their long coherence times and high-fidelity gate operations. A viable path for fabricating donor qubit arrays with atomic precision is scanning tunneling microscopy hydroge…