M. M. Manjurul Islam

Unsupervised feature learning and optimised clustering with fine-tuning for automatic semiconductor wafer defect recognition

M. M. Manjurul Islam, Girijesh Prasad

Abstract Automated identification of wafer defect maps (WDMs) is critical for yield enhancement and quality control in semiconductor manufacturing. However, as defect patterns become increasingly diverse and dynamic, conventional supervised methods remain constrained by their dep…Read more