crossrefApplied Sciences2021-10-13Cited by 61
A Review on Machine and Deep Learning for Semiconductor Defect Classification in Scanning Electron Microscope Images
Francisco López de la Rosa, Roberto Sánchez-Reolid, José L. Gómez-Sirvent, Rafael Morales, Antonio Fernández-Caballero
Continued advances in machine learning (ML) and deep learning (DL) present new opportunities for use in a wide range of applications. One prominent application of these technologies is defect detection and classification in the manufacturing industry in order to minimise costs an…