semantic_scholarMicro and Nano Engineering
Mitigating the degradation of metal–semiconductor contacts with optimized electron beam evaporation
T. Frahm, P. Liebisch, Jochen Heiss, S. Ingebrandt, J. Knoch
T. Frahm, P. Liebisch, Jochen Heiss, S. Ingebrandt, J. Knoch