crossrefMachine Learning: Science and Technology2026-04-27
Deep learning-based mask design method for film thickness uniformity in spherical rotation systems
Gang Wang, Yuhao Li, Ang Li, Li Wang, Yunli Bai
Abstract The uniformity of the film thickness of large-aperture mirror is a critical factor affecting the imaging quality of reflective optical systems. A deep learning-based mask design strategy is proposed to reduce this non-uniformity. By developing a convolutional neural netw…